Adamov Alexander Petrovitch, doctor of technical sciences, professor, honored scientist of the Republic of Dagestan, sub-department of microelectronics, Dagestan State Technical University (70 Shamil street, Makhachkala, Dagestan, Russia), E-mail: email@example.com
Adamova Arina Aleksandrovna, candidate of technical sciences, associate professor, sub-department of design and production technology of the electronic equipment, Bauman Moscow State Technical University (5 2-ya Baumanskaya street, Moscow, Russia), E-mail: firstname.lastname@example.org
Sementsov Stanislav Grigorievich, doctor of technical sciences, professor, sub-department of design and production technology of the electronic equipment, Bauman Moscow State Technical University (5 2-ya Baumanskaya street, Moscow, Russia), E-mail: email@example.com
Temirov Alibulat Temirbekovich, candidate of technical sciences, associate professor, dean of the faculty of radioelectronics, telecommunications and multimedia technologies, Dagestan State Technical University (70 Shamil street, Makhachkala, Dagestan, Russia), Email: firstname.lastname@example.org
Tsivinskaya Tatiana Anatolievna, chief process engineer, sub-department of design and production technology of the electronic equipment, Bauman Moscow State Technical University (5 2-ya Baumanskaya street, Moscow, Russia), E-mail: email@example.com
Background. The work is devoted to the study of the system of protection of the sensitive element of a high-pressure piezoresistive pressure sensor from the influence of an aggressive external environment. This task is especially relevant when developing universal pressure sensors designed to work in a variety of environments, including aggressive ones. The technological aspects of existing technical solutions in the subject area are considered. The purpose of the work is to synthesize technical solutions that allow to optimize the design of such sensors and increase their reliability.
Materials and methods. The optimal size and size of the corrugation of the protective separation membrane made of 12X18H10T steel were determined by the experimental method. During the experiment, the dependence of the maximum working pressure on the volume of the instrument liquid was revealed. As well as the need to know the dependence of the magnitude of the movement of the silicon membrane on the magnitude of the elastic deformations. To determine the magnitude of the displacement, a finite element simulation technique was used in the ANSYS software environment. The simulation made it possible to estimate the distribution of elastic strain values on the membrane surface.
Results. Methods for calculating the size of the separation protective membrane, the calculation of the volume of the instrument liquid, and the table of the dependence of the magnitude of the movements of the silicon membranes on the overall dimensions and the working pressure are proposed. As a result, the calculations are combined to calculate a system consisting of a protective membrane, a silicon working membrane and a volume of liquid. Technological solutions are offered that allow to realize the developed methods and to substantiate the applicability of various structural materials. Elastic deformation values were obtained at different sensor operating ranges.
Conclusions. The methods, technologies and design solutions proposed in this work allow us to solve the problem of creating a universal pressure sensor with a given measurement range operating in the conditions of aggressive external environments at a new qualitative level. The result of a properly calculated force Q, the force of transferring the working pressure to the silicon membrane, is the simple design of a small-sized high-precision pressure sensor operating in aggressive media at high pressures. In addition to reducing the overall dimensions and improving the measurement accuracy, the proposed solutions make it possible to significantly increase the reliability of the sensors in harsh environments.